DIY Physical Vapor Deposition (PVD) using Thermal Evaporation

Описание

This video discusses the building process of a system for doing Physical Vapor Deposition (PVD).

0:00 Intro
1:09 Thin film technology
1:56 Principle of PVD
3:22 Limitations of thermal evaporation
4:48 Thermal source construction
5:50 Required vacuum conditions
7:25 System layout and construction
9:25 Turbo screw up
10:25 Technical aspects
12:02 Plasma cleaning
14:02 Quick evaporation tests

Apart from some technical aspects of the machine, I also discuss the background of thermal evaporation as a technique to do PVD. The system will be used in the future to make small optical devices using photolithography.